LITEN VCR Pressure Gauge 63mm | ASME Certified High Purity Instrument for Semiconductor & Pharma

Surface Finish	<1.6μm Ra (Standard), <0.25μm Ra (Electropolished Option)
Wetted Materials：316L Stainless Steel Bourdon Tube & Process Connection
Pressure Media：Compatible with NF3, ClF3, High Purity Gases
Cleaning Protocol：Ultrasonic Cleaning + Passivation per ASTM A967

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Product Details

Product Tags

LITEN 63mm High Purity VCR Pressure Gauge

Industrial-Grade Precision Measurement

LITEN's 63mm VCR pressure gauge delivers laboratory-grade accuracy (±1.6% full scale) for critical process control applications. Engineered with ultra-clean 316L stainless steel components, our gauges meet stringent requirements for semiconductor manufacturing, pharmaceutical processes, and high-purity gas systems.

Key Advantages

✅ Certified Reliability

ASME B40.1 Grade A Certified | Cleanroom assembled | RoHS compliant

✅ Ultraclean Surface Finish

Optional <0.25μm Ra polishing (standard <1.6μm Ra)

FDA-compliant surface treatment for contamination-sensitive environments

✅ Advanced Cleaning Protocol

Ultrasonic-cleaned components

Passivated surfaces per ASTM A967

Particle-free packaging

Technical Specifications

Parameter	Specification
Accuracy	±1.6% of full scale
Pressure Ranges	0-3000 PSI, Vac-15 PSI, Vac-300 PSI, 0-60 PSI
Connection Types	G ¼ B Male, R ¼ Male, ¼ NPT Male, 9⁄16-18 UNF Male (¼ VCR® compatible)
Materials	316L SS Bourdon tube Stainless steel housing Safety glass window
Process Connection	Lower/Lower back configuration
Temperature Range	-20°C to +60°C (operating)

Bottom VCR Gauge Dimensions

Back mount VCR Gauge Dimensions

Industry Applications

Semiconductor Manufacturing
Ideal for CVD/ALD equipment gas lines
Compatible with NF3, ClF3 and other aggressive media
Pharmaceutical Systems
Validatable for SIP/CIP processes
Electropolished surfaces meet FDA 21 CFR requirements
High Purity Gas Delivery
Helium leak tested <1x10^-9 mbar·l/s
Ultra-low outgassing surfaces