● Leak rate: Max 1×10⁻⁹ Pa·m³/sec (He)
Model
A1
Full-scale Flow Range (N₂ equivalent)
10 SCCM – 30 SLM
Response Time
≤ 1.5 seconds
Accuracy
≤ ±1% of full-scale flow
Linearity
≤ ±0.5% of full scale
Repeatability
≤ ±0.1% of full scale
Operating Pressure Differential
0.05 – 0.28 MPa
Leak Rate
Max 1×10⁻⁹ Pa·m³/sec (He)
Control Range
2–100% of full scale
***Operating Pressure Differential
0.48 MPa
***Pressure Resistance
1 MPa
Operating Temperature
5–45°C
Item
Specification
Valve Type
Normally Closed / Normally Open Solenoid Valve
Connector
1/4" VCR or 1/4" Swagelok Compatible
Seal Type
Rubber Seal
Installation Direction
Any
Materials
SUS316L, fluororubber, PTFE, electromagnetic stainless steel
Surface Finish
≤ 5RA
Weight
approx. 0.8 KG
Item
Specification
Analog Set Voltage
DC 0–5V
Analog Output Voltage
DC 0–5V
Power Supply
±15VDC / +12VDC–+32VDC
+15VDC ±2% 25mA
-15VDC ±2% 180mA
+12VDC 500mA – +32VDC 180mA
Power Consumption
±15VDC: 3.1W
+12VDC–+32VDC: 6W
Analog Interface
9-pin D-sub Male
Digital Interface
RJ11×2